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Electron Transport in Silicon Nanowires: The Role of Acoustic Phonon Confinement and Surface Roughness Scattering

机译:硅纳米线中的电子传输:声学声子的作用   限制和表面粗糙度散射

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摘要

We investigate the effects of electron and acoustic-phonon confinement on thelow-field electron mobility of thin square silicon nanowires (SiNWs) that aresurrounded by SiO$_2$ and gated. We employ a self-consistentPoisson-Schr\"{o}dinger-Monte Carlo solver that accounts for scattering due toacoustic phonons (confined and bulk), intervalley phonons, and the Si/SiO$_2$surface roughness. The wires considered have cross sections between 3 $\times$3 nm$^2$ and 8 $\times$ 8 nm$^2$. For larger wires, as expected, the dependenceof the mobility on the transverse field from the gate is pronounced. At lowtransverse fields, where phonon scattering dominates, scattering from confinedacoustic phonons results in about a 10% decrease of the mobility with respectto the bulk phonon approximation. As the wire cross-section decreases, theelectron mobility drops because the detrimental increase in bothelectron--acoustic phonon and electron--surface roughness scattering ratesovershadows the beneficial volume inversion and subband modulation. For wiresthinner than 5 $\times$ 5 nm$^2$, surface roughness scattering dominatesregardless of the transverse field applied and leads to a monotonic decrease ofthe electron mobility with decreasing SiNWs cross section.
机译:我们研究了电子和声子限制对由SiO $ _2 $包围并进行栅控的细方形硅纳米线(SiNWs)的低场电子迁移率的影响。我们使用自洽的Poisson-Schr \“ {o} dinger-Monte Carlo求解器,该求解器解决了由于声子(受限和整体),区间声子和Si / SiO $ _2 $表面粗糙度引起的散射。在3×3 nm $ ^ 2 $和8×8 nm ^ 2 $之间的截面。对于较大的导线,如预期的那样,迁移率对来自栅极的横向场的依赖性明显。在低横向场,在声子散射占主导地位的情况下,局限声子的散射使迁移率相对于体声子近似值降低了约10%。随着导线截面的减小,电子迁移率下降,因为电子-声子和电子声子的有害增加。表面粗糙度散射率掩盖了有益的体积反转和子带调制,对于小于5 x乘以5 nm $ ^ 2 $的导线,无论施加的横向场如何,表面粗糙度散射都占主导地位,并导致单调随着SiNWs截面的减小,电子迁移率增加。

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